Nanotube MEMS: Modeling extreme nanoscale devices
نویسنده
چکیده
The physics of operation of nanotube NEMS devices is reviewed. Special attention is paid to non-classical effects, rarely described in MEMS analysis, such as van der Waals/Casimir interactions, quantum effects in electrostatics, atomistic parameterization of elasticity. As an example of a breakdown of a classical MEMS theory, the NEMS scaling limitation is derived in a lump model taking into account van der Waals/Casimir attraction.
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